MEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out

We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sensor. MEMS accelerometers using piezoelectric lead zirconate titanate (PZT) thin films as read-out have been attracting a great deal of attention due to their simple structures and high sensitivity. This paper proposes a model of micro pressure sensor with two suspended flexural PZT-on-silicon beams. The geometry and elastic properties of the thin films have been taken into account when formulating the acceleration equations. To verify which vibration mode is the dominant one on the press, mode analysis has been carried out by using MEMS software: CoventorWare. The analytical equation between charge and press has been derived, which provides an opportunity to design the sensor. The research shows that the proposed pressure sensor is simple to manufacturing, and reliable for large g conditions and wide frequency response. 2 STRUCTURE OF TWO PZT THIN FILMS PRESSURE SENSOR